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爱德华真空泵ih600使用说明书

含蓄的冬瓜
彩色的小鸽子
2023-01-14 17:40:17

爱德华真空泵ih600使用说明书

最佳答案
炙热的抽屉
冷静的水杯
2026-04-28 23:52:07

iH600 干式泵 460V,60 Hz,3 相

A59020908

概述

Edwards 高级半导体真空泵已经过现场应用证明,可以按照最高工作标准运行。通过延长使用寿命、提高运行时间并提高生产率,同时最大程度地减小占地面积、降低运行成本,实现了高的可靠性和性能。

  

iH 系列为难以执行的制程(如存在微粒、易冷凝和腐蚀性副产品的 PECVD 和 LPCVD 制程)提供了高可靠性。

应用

负载锁

输送

计量

平版印刷

PVD 制程

PVD 预清洁

RTA

剥离/灰化

刻蚀

植入源

HDP CVD

RTP

SACVD

MCVD

PECVD

LPCVD

ALD

iH600 干式泵 460V,60 Hz,3 相

A59020908

iH600 干式泵 200/208V,50/60 Hz,3 相

A59020945

iH600 干式泵 380/415V,50 Hz,3 相

A59020946

iH600 干式泵 230V,60 Hz,3 相

A59020957

功能和优势

优化了设施消耗。

无需预防性维护。

悬臂轴和特殊的异型转子便于颗粒的处理。

在节省电机功率的同时最大程度提高了工作繁重的 CVD 应用条件下的稳定性。

耐腐蚀的制造材料允许泵送腐蚀性气体。

较高的工作温度为避免气体冷凝提供了充分的安全保证。

整体式轴杆无需使用电机联结器,而第五级泵消除了使用消音器的需要并消除了颗粒堆积,从而降低了总体占地面积。

技术数据

峰值速度    600 m3h-1  

353 cfm  

10000 l min-1  

极限真空    7 x 10-4 mbar  

5.3 x 10-4 Torr  

0.07 Pa  

典型轴封氮流量    4 slm  

进气口连接    ISO100  

出口连接    NW40  

15 psi 压降下典型冷却水流量    240 l h-1  

4 l min-1  

重量    415 kg  

极限功率输入    3.4 kW  

电机额定功率    6.1 kW  

油容量    1.43 l  

  

所有数字均为无气镇时的典型值。

 性能

尺寸

1    进气口  

2    出口  

3    抽风口  

4    变频器箱(仅限 iH1000)  

最新回答
任性的鼠标
羞涩的黑夜
2026-04-28 23:52:07

真空泵使用说明书:

1.查看油位,以停泵时注油至油标中心为宜。过低对排气阀不能起油封作用,影响真空度。过高,可能会引起通大气起动时喷油。运转时,油位有所升高,属正常现象。如是旋片式真空泵真空泵油采用规定牌号的清洁真空泵油,从加油孔加入。加油毕后,应旋一上螺塞。油宜经过滤,以免杂物进入,堵塞油孔。

2.水环式真空泵可在通大气或任何真空度下一次起动。泵口如装接电磁阀,应与泵同时动作。

3.环境温度过高时,油的温度升高,粘度下降,饱和蒸汽压会增大,会引起极限真空有所下降,特别是用热偶计测得的全压强。如加强通风散热,或改善泵油性能,极限真空可得到改善。

4.检查真空泵的极限真空以压缩式水银真空计为准,如计经充分预抽校验,泵温达到稳定,泵口与计直接接通,运转30分钟内,将达到极限真空。总压强计测得之值与泵油和真空计、规管误差有关,有时误差甚至可很大,只能作参考。

5.如相对湿度较高,或被抽气体含较多可凝性蒸汽,接通被抽容器后,宜打开气镇阀,运转20~40分钟后关闭气镇阀。停泵前,可开气镇阀空载运动30分钟,以延长泵油寿命。

6.用油选择:真空泵油的粘度影响起动功率和泵的极限真空,粘度高时对真空度有利,起动功率则大一些。油在泵温下的饱和蒸汽压则会影响泵的极限总压强,越低越好。高速真空泵油和3#扩散泵油的粘度较1号真空泵油大,饱和蒸汽压较1号真空泵油低,但3#扩散泵油价格较高。具体选什么油,可根据上述介绍结合具体使用要求来选择。

(1)一般情况下,凡希望总压强在6X10-2帕以上的应用上海产的高速真空泵油。4升/秒以下小型真空泵也可用1号真空油泵代,8升/秒以上直联泵可用3#扩散泵油代。

(2)如果对真空度要求不高,且油的污染更换频繁,真空泵油供应困难,可采用50号机械油代替。

(3)如果环境温度低,起动困难,极限真空要求不高,可采用粘度较上略低的真空泵油或机械油。

暴躁的板栗
还单身的自行车
2026-04-28 23:52:07
爱德华真空泵保养维护/真空技术/BOC干泵维修</span><br>摘要: 爱德华真空泵是属于油封旋片式机械真空泵, 日常维护检查的内容为观察泵油颜色, 查看油位, 检查<br>进、出气口的过滤器。真空泵的常见故障是漏油、不能达到极限真空度和不能启动。判定故障后, 维修方法是<br>更换老化的密封部件, 添加和更换新油、清洗油路、更换老化的配油器、旋片和弹簧, 更换损坏的电源器件和<br>电机线圈等。最后给出真空泵的性能改造位置和方法。<br><span >BOC真空泵检查维护</span><br>为延长真空泵的使用寿命和无故障工作时间, 应当对爱德华旋片真空泵进行日常检查维护, 建议按表1 进行定期检查维护,<br>表中的维护频次可根据维修经验进行适当调整。<br>1、检查真空泵油油位<br>真空PUMP启动前, 应先从油窗检查油位是否可见并在“M IN ”刻线以上, 只有达到这个位置, 真空泵才能正常运转。另外,<br>启动新真空泵或真空泵有相当一段时间没有运行时, 还应在泵启动后检查油位是否有轻微下降(3~ 5 mm ) , 这个下降表明<br>泵是带油启动。当发现油位不在工作刻线范围内时,应及时注油至工作刻线范围内。<br>表1 <span >爱德华真空泵检查维护一览表</span><table cellspacing="1"cellpadding="1" width="640" border="1"><tbody><tr><td>爱德华PUMP维修频次<td>真空泵维护项目<tr><td>1、日常维护<br>2、初始运行100 小时每运行6 个月大修<br>3、6 个月<br>4、12 个月<br><br> <td>1、检查泵油油位和颜色<br>2、换油<br>3、清洗内部油过滤器<br>4、检查排气阀和O 形圈, 必要时更换 检查配油器橡胶封,<br>必要时更换,检查马达部件防泄露油封<br> <tr><td>备注:<td>如果泵使用在易污染的、脏的系统时, 应加大换油、清洗过<br>滤器的频次</table><br><br> <br><br><p>2、观察BOC Edwards真空泵油颜色<br>应定期在油窗内观察泵油颜色, 油应当清澈透明, 呈焦黄色, 如若发现泵油变色或出现浑浊,应当及时更换泵油, 否则会影响真<br>空泵的使用寿命和抽真空效果, 建议使用爱德华泵油。排油时建议让泵运行15 m in, 使泵油变热, 以利于泵油流出。<br>3、检查BOC DRY PUMP进气口、排气口的过滤器或阱<br>当进气口、排气口安装有过滤器或阱, 如捕捉罐、灰尘过滤器、干燥阱、化学阱、油雾过滤器等时, 应当定期检查, 以确保进<br>气口和排气口畅通。进气口或排气口堵塞时, 容易造成真空系统真空抽不上去, 严重时, 可引起真空泵内压力上升, 这将导致密<br>封破坏和油箱破裂, 引起物理损伤。<br>4、检查是否漏油<br>应当经常检查油窗、油箱密封垫处、电机轴承盘处以及泵的其他部位是否有泵油渗出, 发现有漏油时应及时进行维修。

顺心的枕头
精明的缘分
2026-04-28 23:52:07
IV, installation explains 1 , the pump ought to assemble be ventilated in drying, clean occasion2, the pump and the electric motor share a piece of bottom board, bottom board and the floor get in touch with each other. The floor responds to solid even, pump lay respond to stable reality. Use anchor bolt to fix the pump in the floor , should stay dismounting the space being maintained just the right amount around the pump. 3, the pump links with that the container is taken out the hose available or metal uses hard Guan Shi of metal stiffly, may append the rubber tube on the pipeline, the plastic flexible pipe that the metal bellows or the inner shoots on spring transits, to fall off shaking and improving connection hermetic sealing4, electric motor vergence responds to and revolution direction does not allow a reversion consistently on the pump. The label stipulates the power source linking up according to the electric motor , earth wire and capacities fuse wire suitable etc. protects safe measure of electric motor. 5, the pump air inlet pipe says that common principle, responds to according to vacuum system to the full greatly , to the full short, to the full only , to the full clean, to the full few elbows, to fall off taking fast loss out. 6, is entered quilt taking a container out for pump inner oil returns to when avoiding stopping a pump, ought to deploy the vacuum stop valve and air-filled valve in pump mouth. A handy way one deploying corresponding specification in pump electromagnetism vacuum takes air-filled valve (DDC-JQXX) to be OK at present , this valve coming untied , pass and pump are broken , stop being in progress synchroly. The fault of use 1 , intermittent starting pump (number of times unsuitable is many) V, the oil observing a pump is in oil bid middle horizontal line vicinity one point face to face , may throw into the regular travel thenOtherwise oil living with low face to face , may stop a pump making a greater effort to be labeled with the centre horizontal line till oil, if oil is excessive face to face, need then stopping a pump let go of oil till oil is labeled with centre horizontal line nearby, will be notable having gushing oilWhen 2, thinking that the ambient temperature is lower than 5 ~C but are difficult to start a pump, may oil be discharged heating till again, 20-30 ~C adding to pump middle, and then starting again a pump , use electric furnace to be put in pump side Jiawen or. 3, should shrink to get rid of as well as may curdle may open gas town valve travel 30-60min even longer one point time when nature steam gas, the gas removes in order to being beneficial to may curdle, prolong glib life time of pump4, allows the pump temperature ≤(oil temperature- ambient temperature) = 40 ~C, ding-dang greater than 40 ~C o'clock, need to pump sharpening ventilation heat dissipation5, enters air temperature degree should not overtop 40 under the control of ~C. 6, stops closing the gas town valve, to prevent from an oil leak without fail behind the pump. The upkeep and the oil maintenance 1 , often paying attention to oil level when moving round regularly are in oil bid centre horizontal line nearby face to face VI, are not excessive neither too lowThe mass paying attention to oil at the same time changes status , thinks that oil level rises or paints obviously when the color assumes the milky white (yellow) shape , explains that the pump inner has drunk water or matter, has needed other examination trouble shooting. 2, changes the oil time limit: The in general new pump suggests changing an once in full 100 hours or so of travel , one , two take second place like this rear lengthen change the oil time limit , suggest may change the oil once in 500-1000 hours when clean air if being that the inner is drawn out quilt taking a container out is dry,Handle the outside then except carrying out me before the gas enters a pump first if the gas being drawn out is not to affect vacuum degree when having corrosivity or the meeting to get chemical reaction with pump oil,fairly available frequent change the oily way reparation. Stalled pressure cannot sometimes reach the long to storing a time limit pump leaving the factory upper famous brand index value, the hermetic pump mouth holds gas town valve air exhaust now 4 presents a retinue for a short time being OKWhen necessary may change oilChange oil method: The hermetic air inlet, opens a pump 0. Paint Kong Fang oil 5 hours, again from readjusting oneself to a certain extent, the air inlet presses down on air exhaust then in atmosphere 0.5 min, adds a few clean vacuum pumps oil at the same time slowly from the air inlet , the whorl readjusts oneself to a certain extent the oil plug screw queen in order to displace pump memory oil, and to keep lubrication, tightly after the person is discharged from, from making a greater effort to add new oil , paying attention to not let pellet varia sneak into oil middle. The pump adopt SY1634-701 number vacuum pump oil like oil. 3 pumps respond to the system having different periodic inspection's made to order according to different service conditions. Principle is: Take the drying except the gas out under (1) ordinary circumstances and clean, examine and repair after suggesting may use 2000 hours in the pump. (2) new pumps throw into the full 500 hours queen of travel carrying out an once on the exhaust valve examine and repair, hereafter may prolong according to the circumstances or shorten examining and repairing a period. (3) pumps work to discover pump oil Yi in process being contaminated , the oil (pump) temperature is high or another piece status having chemical action other to rubber sum or, may examine and repair a period according to reality curtailing , change and the document easy to deride in time. That (4) pumps appear is abnormal when sound and oil exhausting undulate face to face , responds to the working condition examining exhaust valve movie's in time.

迷人的心情
朴素的菠萝
2026-04-28 23:52:07
旋片式真空泵使用说明:1、与泵联接的管道不宜过长,且不宜小于泵的进气口径。2、被抽气体温度不得高于40℃,否则应把气体冷至常温。3、含有较多尘埃的气体则应加以过滤,有腐蚀性及油起化学反应之气体则应加气体吸收及综合装置,如含水蒸气过多,则应加去湿装置,以防止泵油弄脏,影响其真空性能及泵的使用寿命。4、泵云装过程中油温不能高于70℃,在正常工作时应听到“嗒、嗒、嗒”之排气声,如有异声或温度骤升时应停止工作,检查原因。▲检查油温时,小心接触,以免烫伤。5、泵不使用时,应把进气口盖好,以免污物落入泵内6、停泵前必须关闭其余被抽系统联接之阀门(避免泵油进入被抽系统),然后关闭电机并注意是否打开了充气阀,最后停止冷却水。7、普诺克真空科技本产品使用的真空泵油如为本《使用说明书》上规定性能则能保证产品性能。但如用其它的品种,我们将不能确保泵的性能达到使用要求和寿命要求。8、根据不同的使用环境,油的更换周期不同。更换油时,先敞开进气口,拆下油箱盖,用于旋转皮带轮(按箭头方向),把泵腔油全部排至油箱,用油扫扫出后用布抹干净。如需彻底淸洁,可再在进气口倒适量的清洁油,重复上述过程。清完后,倒入新真空泵油至油镜中线位置(保证正常运行时,油面处于油镜中线高度),注意油量不能过多,否则会影响泵的再次启动及喷油。9、真空泵是用来抽除密封容器中的气体,开机后会从排气口排出油和空气混合的烟雾状气体,俗称“烟”。排“烟”时间长短视容器大小而定。如果在油温不高的情况下长时间有烟,则证明管道或被抽容器漏气直接导致真空度不高,应检查漏气原因。▲泵内部核心部件,非绝对必要,切不可自行拆卸,如有损坏或装配不当,会影响泵的性能。

着急的小蘑菇
矮小的奇异果
2026-04-28 23:52:07

直联旋片式真空泵

翻译为英文是:

Direct couplet vacuum pump

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